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17 March 2023 Fabrication of periodic microcapsule structures on silicone rubber by 193 nm ArF excimer laser
Kaede Iwasaki, Tsuyoshi Yoshida, Masayuki Okoshi
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Proceedings Volume PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; PC124080O (2023) https://doi.org/10.1117/12.2649603
Event: SPIE LASE, 2023, San Francisco, California, United States
Abstract
Our laboratory has reported that periodic micro swelling structures on silicone rubber surfaces are photochemically formed, and the surface has superhydrophobicity. At the conference, the formation of capsule structures on the top of periodic micro swelling structures on silicone rubber surface by 193 nm ArF excimer laser irradiation will be reported. The microcapsule structure is formed by irradiating the silicone rubber with silica microspheres aligned in a single layer with the 193 nm ArF excimer laser. The formation method and the nature of the microcapsule structure will be discussed.
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Kaede Iwasaki, Tsuyoshi Yoshida, and Masayuki Okoshi "Fabrication of periodic microcapsule structures on silicone rubber by 193 nm ArF excimer laser", Proc. SPIE PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, PC124080O (17 March 2023); https://doi.org/10.1117/12.2649603
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KEYWORDS
Silicon
Excimer lasers
Semiconductor lasers
Silica
Liquids
Hydrogen fluoride lasers
Polymers
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