Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Micromachined silicon cantilever beam accelerometer incorporating an integrated optical waveguide

[+] Author Affiliations
Kevin E. Burcham, Gregory N. De Brabander, Joseph T. Boyd

Univ. of Cincinnati (USA)

Proc. SPIE 1793, Integrated Optics and Microstructures, 12 (March 2, 1993); doi:10.1117/12.141218
Text Size: A A A
From Conference Volume 1793

  • Integrated Optics and Microstructures
  • Massood Tabib-Azar; Dennis L. Polla
  • Boston, MA | September 08, 1992

abstract

A micromachined cantilever beam accelerometer is described in which beam deflection is determined optically. A diving board structure is anisotropically etched into a silicon wafer. This diving board structure is patterned from the wafer backside so as to leave a small gap between the tip of the diving board and the opposite fixed edge on the front side of the wafer. In order to sense a realistic range of accelerations, a foot mass incorporated onto the end of the beam is found to provide design flexibility. A silicon nitride optical waveguide is then deposited by low pressure chemical vapor deposition (LPCVD) onto the sample. Beam deflection is measured by the decrease of light coupled across the gap between the waveguide sections. In order to investigate sensor response and simulate deflection of the beam, we utilized a separate beam and waveguide section which could be displaced from one another in a precisely controlled manner. Measurements were performed on samples with gaps of 4.0, 6.0, and 8.0 micron and the variation of the fraction of light coupled across the gap as a function of displacement and gap spacing was found to agree with overlap integral calculations.

© (1993) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Kevin E. Burcham ; Gregory N. De Brabander and Joseph T. Boyd
"Micromachined silicon cantilever beam accelerometer incorporating an integrated optical waveguide", Proc. SPIE 1793, Integrated Optics and Microstructures, 12 (March 2, 1993); doi:10.1117/12.141218; http://dx.doi.org/10.1117/12.141218


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.