Integrated optical pressure sensor with coupling structures

Joerg Mueller; Dieter Zurhelle; Kai H. Fischer; Andrea Loeffler-Peters; Rainer Hoffmann

doi:10.1117/12.141880

6 April 1993 Integrated optical pressure sensor with coupling structures

Joerg Mueller, Dieter Zurhelle, Kai H. Fischer, Andrea Loeffler-Peters, Rainer Hoffmann

Proceedings Volume 1794, Integrated Optical Circuits II; (1993) https://doi.org/10.1117/12.141880
Event: Fibers '92, 1992, Boston, MA, United States

Abstract

Silicon technology is a well known, controlled technology, which has the advantage that optical and electronic circuits as well as micromechanics can be integrated on the same substrate. This paper presents the design and the realization of an integrated optical pressure sensor. It includes a Mach-Zehnder interferometer, coupling structures of waveguide to fiber and optical detectors, which are integrated into the silicon substrate. As silicon is the detector material wavelengths below 1 micrometers are used. The fiber coupling structure is realized by means of plasma- or KOH-etching. Microoptical lenses with a focal length near 1.0 mm fabricated by Laser-CVD may reduce coupling losses. The interferometer consists of strip- loaded waveguides made of an SiO₂-SiON-SiO₂ sandwich deposited on the silicon substrate by an LPCVD- or PECVD-process. For pressure sensing a membrane beneath one of the interferometer paths is micromachined from the reverse side by a fast plasma etching process. The optical detection is accomplished by an endfire coupling structure consisting of an antireflectivity coated vertical silicon PIN-diode integrated in a 15 micrometers epilayer at a step in the substrate.

Citation Download Citation

Joerg Mueller, Dieter Zurhelle, Kai H. Fischer, Andrea Loeffler-Peters, and Rainer Hoffmann "Integrated optical pressure sensor with coupling structures", Proc. SPIE 1794, Integrated Optical Circuits II, (6 April 1993); https://doi.org/10.1117/12.141880

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available