Characterization, setup, and control of a manufacturing laser ablation tool and process

Gerhard E. Wolbold; Christopher L. Tessler; Dawn J. Tudryn

doi:10.1117/12.143030

19 April 1993 Characterization, setup, and control of a manufacturing laser ablation tool and process

Gerhard E. Wolbold, Christopher L. Tessler, Dawn J. Tudryn

Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143030
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

This paper is a description of the ablation of polyimide with an excimer laser ablation tool in a manufacturing line. The light source is a 150 watt, XeCl (308 nm) gas laser. Two methods of ablating via patterns with the laser tool (full-chip and scan modes) will be discussed, in addition to the tool, set-up, operation and tool/process control.

Citation Download Citation

Gerhard E. Wolbold, Christopher L. Tessler, and Dawn J. Tudryn "Characterization, setup, and control of a manufacturing laser ablation tool and process", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); https://doi.org/10.1117/12.143030

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