Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Two-dimensional array of optical interference filters produced by lithographic alterations of the index of refraction

[+] Author Affiliations
Sumanth Kaushik, Brian R. Stallard

Sandia National Labs. (USA)

Proc. SPIE 2532, Application and Theory of Periodic Structures, 276 (September 22, 1995); doi:10.1117/12.221254
Text Size: A A A
From Conference Volume 2532

  • Application and Theory of Periodic Structures
  • Tomasz Jannson
  • San Diego, CA, United States | July 09, 1995

abstract

We describe a new concept for producing, on a single substrate, a 2D array of optical interference filters where the pass-band of each element can be independently specified. The interference filter is formed by optically contacting two dielectric mirrors so that the top quarter-wave films of the two mirrors form a Fabry-Perot cavity having a half-wave thickness. In the new device, we propose to etch an array of subwavelength patterns into the top surface of one of the mirrors before forming the cavity. The patterns must have a pitch shorter than the operational wavelength in order to eliminate diffraction. By changing the index of refraction of the half-wave layer, or the optical thickness of the cavity, the patterning is used to shift the pass-band and form an array of interference filters. One approach to producing the array is to change the fill factor of the pattern. Once the filter array is produced it may be mated to a 2D detector array to form a miniature spectrophotometer.

© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Sumanth Kaushik and Brian R. Stallard
"Two-dimensional array of optical interference filters produced by lithographic alterations of the index of refraction", Proc. SPIE 2532, Application and Theory of Periodic Structures, 276 (September 22, 1995); doi:10.1117/12.221254; http://dx.doi.org/10.1117/12.221254


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.