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Proceedings Article

Combining ion figuring and SPSI testing to produce a high-quality aspheric 18-inch-diameter f/2 mirror

[+] Author Affiliations
Frank A. Carbone

Eastman Kodak Co. (USA)

David A. Markle

Ultratech Stepper, Inc. (USA)

Proc. SPIE 2536, Optical Manufacturing and Testing, 89 (September 8, 1995); doi:10.1117/12.218411
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From Conference Volume 2536

  • Optical Manufacturing and Testing
  • Victor J. Doherty; H. Philip Stahl
  • San Diego, CA | July 09, 1995

abstract

Ion figuring is an efficient and deterministic process for fabricating high quality optical surfaces. The simultaneous phase shifting interferometer is a helium-neon laser-based Twyman-Green system capable of data acquisition at shutter speeds of up to 1/10,000th of a second, which eliminates vibration effects. Ion figuring and simultaneous phase shifting interferometry were successfully combined to produce an aspheric, 18 inch diameter, f/2, ULE mirror of exceptional surface figure quality. Through iterative cycles of SPSI testing and ion figuring, the mirror surface was processed to a final figure quality of 0.007 (lambda) rms (95% of data <EQ 0.028 (lambda) p-v). The radius of curvature of the mirror was held to within 0.00008 inch of the design radius. Details of the testing/figuring cycles are discussed along with information regarding the mirror mounting scheme, interferometer calibration, and data analysis techniques.

© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Frank A. Carbone and David A. Markle
"Combining ion figuring and SPSI testing to produce a high-quality aspheric 18-inch-diameter f/2 mirror", Proc. SPIE 2536, Optical Manufacturing and Testing, 89 (September 8, 1995); doi:10.1117/12.218411; http://dx.doi.org/10.1117/12.218411


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