Roughness measurement of dielectrics with light scatter

Marvin L. Bernt; John C. Stover

doi:10.1117/12.218338

1 September 1995 Roughness measurement of dielectrics with light scatter

Marvin L. Bernt, John C. Stover

Proceedings Volume 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries; (1995) https://doi.org/10.1117/12.218338
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

The literature now includes a number of examples where light scatter (BRDF) measurements have been used to determine the surface power spectral density function of smooth, clean reflectors. But most of this data is for front surface metal mirrors and semiconductors. Black glass has been considered for use as a BRDF standard, and there are industry applications (computer disks and front panel displays) that could benefit from the same type of characterization from glass and ceramic surfaces. This paper addresses some of the issues involved with making surface roughness measurements on these surfaces. For example, clear glass will scatter a visible beam from its bulk and second surface as well as its front surface. In addition, calculation of the polarization constant Q must be handled in a more accurate manner. Data from several samples will be analyzed.

Citation Download Citation

Marvin L. Bernt and John C. Stover "Roughness measurement of dielectrics with light scatter", Proc. SPIE 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries, (1 September 1995); https://doi.org/10.1117/12.218338

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