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Proceedings Article

Extreme ultraviolet scatter from particulate-contaminated mirrors

[+] Author Affiliations
Michael P. Newell, Laura A. Whitlock, Ritva A. M. Keski-Kuha

NASA Goddard Space Flight Ctr. (USA)

John L. Jackson

New Renaissance Technology, Inc. (USA)

Proc. SPIE 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries, 174 (September 1, 1995); doi:10.1117/12.218335
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From Conference Volume 2541

  • Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries
  • John C. Stover
  • San Diego, CA | July 09, 1995

abstract

The BRDF of a MgF2 protected Al mirror contaminated with dust particulates due to exposure to the laboratory environment has been measured and is presented for wavelengths of 633 nm, 325 nm, 121.6 nm, and 74 nm. This experimental data is compared with theoretical predictions arising from the OPALS modeling software. This model calculates the BRDF based on the measured particlate distribution found on the surface, and the optical constants of the contaminant. The OPALS software shows promise as a useful tool in the design phase of optical instruments: for drawing up contamination budgets and for incorporation into stray light analysis predicting instrument performance.

© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Michael P. Newell ; Laura A. Whitlock ; Ritva A. M. Keski-Kuha and John L. Jackson
"Extreme ultraviolet scatter from particulate-contaminated mirrors", Proc. SPIE 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries, 174 (September 1, 1995); doi:10.1117/12.218335; http://dx.doi.org/10.1117/12.218335


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