Extreme ultraviolet scatter from particulate contaminated mirrors

Michael Phillip Newell; Laura A. Whitlock; Ritva A. M. Keski-Kuha; John Larkin Jackson

doi:10.1117/12.218335

1 September 1995 Extreme ultraviolet scatter from particulate-contaminated mirrors

Michael Phillip Newell, Laura A. Whitlock, Ritva A. M. Keski-Kuha, John Larkin Jackson

Proceedings Volume 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries; (1995) https://doi.org/10.1117/12.218335
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

The BRDF of a MgF₂ protected Al mirror contaminated with dust particulates due to exposure to the laboratory environment has been measured and is presented for wavelengths of 633 nm, 325 nm, 121.6 nm, and 74 nm. This experimental data is compared with theoretical predictions arising from the OPALS modeling software. This model calculates the BRDF based on the measured particlate distribution found on the surface, and the optical constants of the contaminant. The OPALS software shows promise as a useful tool in the design phase of optical instruments: for drawing up contamination budgets and for incorporation into stray light analysis predicting instrument performance.

Citation Download Citation

Michael Phillip Newell, Laura A. Whitlock, Ritva A. M. Keski-Kuha, and John Larkin Jackson "Extreme ultraviolet scatter from particulate-contaminated mirrors", Proc. SPIE 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries, (1 September 1995); https://doi.org/10.1117/12.218335

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