Paper
8 September 1995 Ferroelectric arrays: the route to low-cost uncooled infrared imaging
Stephen G. Porter, Rex Watton, Kennedy Robert McEwen
Author Affiliations +
Abstract
Large arrays of ferroelectric elements have considerable potential for thermal imaging applications, offering operation and performance which challenges the cooled semiconductor detectors. A hybrid array technology, exploiting ferroelectric ceramic materials is the basis of a successful range of two dimensional arrays. The success is based on hot pressed ceramic (operated in both pyroelectric and dielectric bolometer modes), and the technologies for solder bump bonding and element reticulation. Arrays have been made with up to 105 elements at pitches down to 40 micrometer, thus providing high resolution in compact systems. Ferroelectrics have now been produced as thin films with high figures of merit and, once deposition techniques compatible with silicon integrated circuits have been demonstrated, these will allow a more direct array fabrication. These integrated array technologies have potential for high yield and low cost arrays of very large numbers of elements. Thermal imaging systems research has led to a signal conditioning architecture optimized for pyroelectric and dielectric bolometer arrays and exploiting the ac coupling of the ferroelectric response to the radiation. The resulting compact sensors give high image quality with low fixed pattern nose in reliable, low power formats.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stephen G. Porter, Rex Watton, and Kennedy Robert McEwen "Ferroelectric arrays: the route to low-cost uncooled infrared imaging", Proc. SPIE 2552, Infrared Technology XXI, (8 September 1995); https://doi.org/10.1117/12.218255
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Cited by 7 scholarly publications.
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KEYWORDS
Sensors

Thermography

Silicon

Ceramics

Imaging systems

Semiconducting wafers

Bolometers

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