Low-cost uncooled microbolometer imaging system for dual use

Neal R. Butler; Richard J. Blackwell; Robert Murphy; Raymond J. Silva; Charles A. Marshall

doi:10.1117/12.218256

8 September 1995 Low-cost uncooled microbolometer imaging system for dual use

Neal R. Butler, Richard J. Blackwell, Robert Murphy, Raymond J. Silva, Charles A. Marshall

Proceedings Volume 2552, Infrared Technology XXI; (1995) https://doi.org/10.1117/12.218256
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Loral Infrared & Imaging Systems is developing low cost, high performance uncooled infrared imaging products for both military and commercial applications. These products are based on the microbolometer technology, a silicon micromachined sensor which combines the wafer level silicon processing with a device structure capable of yielding NETD performance of better than 40 mK. To achieve a low cost sensor, Loral is proceeding with an integrated approach to the design and manufacturing processes associated with each major element of the uncooled sensor: focal plane array, electronics, optics and housings. Loral's 327 by 245 focal plane array has a 46.25 micrometer pixel pitch and incorporates a CMOS readout integrated circuit (ROIC). The ROIC has been designed to greatly simplify the external electronics, and features a single output which can operate at both 60 Hz (NTSC) and 50 Hz (PAL) video rates. The sensor electronics have been designed to meet a broad range of end user applications by providing both analog video and digital outputs with a large selection of user definable options and operating modes. To achieve low manufacturing costs across multiple end user applications, common optical interfaces, structural components, and manufacturing processes are being utilized. Sensor NETD is projected to be 40 mK normalized to f/1 and a 30 Hz frame rate. MRT is projected to be better than 0.1 degree Celsius at f₀.

Citation Download Citation

Neal R. Butler, Richard J. Blackwell, Robert Murphy, Raymond J. Silva, and Charles A. Marshall "Low-cost uncooled microbolometer imaging system for dual use", Proc. SPIE 2552, Infrared Technology XXI, (8 September 1995); https://doi.org/10.1117/12.218256

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