Paper
2 August 1995 Ultraprecision grinding of optical materials and components applying ELID (electrolytic in-process dressing)
Hitoshi Ohmori
Author Affiliations +
Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215603
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan
Abstract
A grinding method which uses specific metallic bond fine grit wheels and electrolytic in- process dressing (ELID) is proposed for the effectual mirror surface grinding of brittle materials. Significant results such as high ground surface quality and ultraprecision grinding have been achieved through the use of this new grinding technique: `ELID-Grinding'. The ELID technique realizes efficient grinding by eliminating several grinding steps and interprocess dressings, in the general grinding operation. Applications to optical components have also started.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hitoshi Ohmori "Ultraprecision grinding of optical materials and components applying ELID (electrolytic in-process dressing)", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); https://doi.org/10.1117/12.215603
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Cited by 5 scholarly publications.
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KEYWORDS
Surface finishing

Mirrors

Silicon carbide

Glasses

Silicon

Surface roughness

Chemical vapor deposition

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