Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Computerized interferometric measurement of surface microstructure

[+] Author Affiliations
James C. Wyant

WYKO Corp. and Optical Sciences Ctr./Univ. of Arizona (USA)

Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, 122 (August 2, 1995); doi:10.1117/12.215586
Text Size: A A A
From Conference Volume 2576

  • International Conference on Optical Fabrication and Testing
  • Toshio Kasai
  • Tokyo, Japan | June 05, 1995

abstract

Nearly all modern high-quality measuring instruments now use micro computers for the collection and analysis of data. This paper describes a computerized interferometric microscope system for the measurement of surface microstructure. For the instrument described in this paper the surface microstructure can be measured at data array sizes as large as 739 X 484 points for measurement fields ranging from 30 X 25 microns to 8.2 X 6.1 mm. A repeatability of the surface height measurements of less than 0.1 nm can be obtained for smooth surfaces. Surfaces having height variances as large as 500 microns can be measured to within an accuracy of a few nanometers.

© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

James C. Wyant
"Computerized interferometric measurement of surface microstructure", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, 122 (August 2, 1995); doi:10.1117/12.215586; http://dx.doi.org/10.1117/12.215586


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.