Analysis of the measurement range in Fizeau phase-stepping interferometry using the moire effect

Benito Vasquez Dorrio; Jesus Blanco-Garcia; Angel F. Doval; Jose Carlos Lopez Vazquez; R. Soto; J. L. Fernandez; Mariano Perez-Amor

doi:10.1117/12.215626

2 August 1995 Analysis of the measurement range in Fizeau phase-stepping interferometry using the moire effect

Benito Vasquez Dorrio, Jesus Blanco-Garcia, Angel F. Doval, Jose Carlos Lopez Vazquez, R. Soto, J. L. Fernandez, Mariano Perez-Amor

Author Affiliations +

Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215626
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan

Abstract

In this work, the phase evaluation of multiple-beam Fizeau interferograms is carried out by the usual phase-stepping algorithms by superimposing the interferogram on a Ronchi grid located at the interferometer image plane. The phase modulation, required for phase measurement, is obtained by translating the grid in its own plane, while a slight defocusing in the image acquisition system provides a suitable sinusoidal intensity pattern. An estimation of the measurable range of surface slopes is calculated and experiments on a spherical surface have been realized in order to analyze the validity of the obtained results.

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Benito Vasquez Dorrio, Jesus Blanco-Garcia, Angel F. Doval, Jose Carlos Lopez Vazquez, R. Soto, J. L. Fernandez, and Mariano Perez-Amor "Analysis of the measurement range in Fizeau phase-stepping interferometry using the moire effect", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); https://doi.org/10.1117/12.215626

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