Super-smooth polishing on aspherical surfaces (I): high-precision coordinate measuring and polishing systems

Mahito Negishi; Manabu Ando; Masafumi Takimoto; Akinobu Deguchi; Hiroji Narumi; Nobuo Nakamura; Hironori Yamamoto

doi:10.1117/12.215612

2 August 1995 Super-smooth polishing on aspherical surfaces (I): high-precision coordinate measuring and polishing systems

Mahito Negishi, Manabu Ando, Masafumi Takimoto, Akinobu Deguchi, Hiroji Narumi, Nobuo Nakamura, Hironori Yamamoto

Author Affiliations +

Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215612
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan

Abstract

For the purpose of fabricating free-form optical elements with the accuracy of 80 nm PV, the Canon Super-Smooth Polisher has been developed. It has a high resolution on-machine coordinate measuring system that utilizes a contact probe. A unique probe structure is proposed, by which both inclination and motion errors of the probe are simultaneously compensated. The flaw problem is discussed from an experimental point of view, and it is found that the major cause of flaws is dirt on the probe or the workpiece. Fourteen axes interferometers are used to compensate for mechanical motion errors. The scanning speed of 4 mm/s is achieved by speeding up the force controller. The measurement results show good repeatabilities of 3 nm RMS for a 540 mm line measurement, and 9 nm RMS for a (phi) 500 mm aspherical surface measurement.

Citation Download Citation

Mahito Negishi, Manabu Ando, Masafumi Takimoto, Akinobu Deguchi, Hiroji Narumi, Nobuo Nakamura, and Hironori Yamamoto "Super-smooth polishing on aspherical surfaces (I): high-precision coordinate measuring and polishing systems", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); https://doi.org/10.1117/12.215612

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