Applications of noncontacting surface measurement in micromechanics

Alistair J.C. Brown

doi:10.1117/12.230396

19 January 1996 Applications of noncontacting surface measurement in micromechanics

Alistair J.C. Brown

Proceedings Volume 2599, Three-Dimensional and Unconventional Imaging for Industrial Inspection and Metrology; (1996) https://doi.org/10.1117/12.230396
Event: Photonics East '95, 1995, Philadelphia, PA, United States

Abstract

Micromechanics is placing new demands on surface metrology equipment due to the fragility and small size of the mechanical components being fabricated. For research and development purposes both static measurement of component dimensions and thickness and dynamic measurements of deflection and vibrational amplitude are essential. This paper describes a new laser based non-contacting surface measurement system which is finding increasing application for these tasks. The system employs the dynamic focusing principle and has a measurement range of 1000 micrometers and a vertical resolution of 6 nm. The lateral resolution of the system is 1 micrometer and measurements may be made at up to 10 KHz. A built in observation window allows simultaneous measurement and observation of the measurement spot and surrounding region.

Citation Download Citation

Alistair J.C. Brown "Applications of noncontacting surface measurement in micromechanics", Proc. SPIE 2599, Three-Dimensional and Unconventional Imaging for Industrial Inspection and Metrology, (19 January 1996); https://doi.org/10.1117/12.230396

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