Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

In-situ wafer contamination detection through rf-PCD Measurements

[+] Author Affiliations
Jurgen Michel, Marcia R. Black, G. J. Norga, Kathryn A. Black, Hichem M'saad, Lionel C. Kimerling

Massachusetts Institute of Technology (USA)

Proc. SPIE 2638, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II, 256 (September 18, 1995); doi:10.1117/12.221203
Text Size: A A A
From Conference Volume 2638

  • Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II
  • John K. Lowell; Ray T. Chen; Jagdish P. Mathur
  • Austin, TX, United States | October 25, 1995

abstract

Radio-frequency photoconductance decay (RF-PCD) is a contactless method of measuring minority carrier lifetime in silicon. Low detection limits and speed of measurement makes this method ideally suited for in-situ determination of silicon wafer passivation and contamination processes. Comparative measurements of copper contamination of silicon surfaces using RF- PCD and TXRF yield a detection limit of about 109 Cu/cm2. The fast detection of changes in surface defects enables the time resolved observation of surface passivation breakdown due to the exposure of the wafer to controlled atmospheres. While nitrogen does not attack the surface passivation, oxygen exposure results in immediate native oxide growth.

© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Jurgen Michel ; Marcia R. Black ; G. J. Norga ; Kathryn A. Black ; Hichem M'saad, et al.
"In-situ wafer contamination detection through rf-PCD Measurements", Proc. SPIE 2638, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II, 256 (September 18, 1995); doi:10.1117/12.221203; http://dx.doi.org/10.1117/12.221203


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.