Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Gas-phase silicon micromachining with xenon difluoride

[+] Author Affiliations
Floy I. Chang, Richard Yeh, Gisela Lin, Patrick B. Chu, Eric G. Hoffman, Ezekiel J. Kruglick, Kristofer S. J. Pister

Univ. of California/Los Angeles (USA)

Michael H. Hecht

Jet Propulsion Lab. (USA)

Proc. SPIE 2641, Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, 117 (September 13, 1995); doi:10.1117/12.220933
Text Size: A A A
From Conference Volume 2641

  • Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
  • Wayne Bailey; M. Edward Motamedi; Fang-Chen Luo
  • Austin, TX | October 23, 1995

abstract

Xenon difluoride is a gas phase, room temperature, isotropic silicon etchant with extremely high selectivity to many materials commonly used in microelectromechancial systems, including photoresists, aluminum, and silicon dioxide. Using a simple vacuum system, the effects of etch aperture and loading were explored for etches between 10 and 200 micrometers . Etch rates as high as 40 micrometers /minute were observed. Initial characteriation of wafer surface temperature during the etch indicates tens of degrees of self-heating, which is known to cause substantial decrease in etch rate.

© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Floy I. Chang ; Richard Yeh ; Gisela Lin ; Patrick B. Chu ; Eric G. Hoffman, et al.
"Gas-phase silicon micromachining with xenon difluoride", Proc. SPIE 2641, Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, 117 (September 13, 1995); doi:10.1117/12.220933; http://dx.doi.org/10.1117/12.220933


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Journal Articles

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.