Micromachined confocal optical microscope

David L. Dickensheets; Gordon S. Kino

doi:10.1117/12.237462

10 April 1996 Micromachined confocal optical microscope

Proceedings Volume 2655, Three-Dimensional Microscopy: Image Acquisition and Processing III; (1996) https://doi.org/10.1117/12.237462
Event: Electronic Imaging: Science and Technology, 1996, San Jose, CA, United States

Abstract

In this paper we describe a new fiber confocal optical microscopy with miniature scanner and imaging optics that is being developed for in situ imaging applications. The microscope uses torsional mirrors to accomplish the scanning. The mirrors, which are 300 X 360 micrometers and 500 X 600 micrometers , respectively, are fabricated with silicon micromachining techniques and produce a raster scan at video rates suitable for real time imaging. The objective is an off-axis grating lens and has numerical aperture of 0.25. Imaging is monochromatic at (lambda) equals 0.6328 micrometers , and the system is capable of approximately 1.0 micrometers resolution over a 100 micrometers field of view. The cross sectional dimensions of the imaging head that contains the mirrors and the lens is 1.2 X 2.5 mm. We present the microscope architecture and discuss the design parameters, the limitations, and the performance tradeoffs that were faced in developing this microscope.

Citation Download Citation

David L. Dickensheets and Gordon S. Kino "Micromachined confocal optical microscope", Proc. SPIE 2655, Three-Dimensional Microscopy: Image Acquisition and Processing III, (10 April 1996); https://doi.org/10.1117/12.237462

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