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Proceedings Article

Micromachined confocal optical microscope

[+] Author Affiliations
David L. Dickensheets, Gordon S. Kino

Stanford Univ. (USA)

Proc. SPIE 2655, Three-Dimensional Microscopy: Image Acquisition and Processing III, 79 (April 10, 1996); doi:10.1117/12.237462
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From Conference Volume 2655

  • Three-Dimensional Microscopy: Image Acquisition and Processing III
  • Carol J. Cogswell; Gordon S. Kino; Tony Wilson
  • San Jose, CA, United States | January 28, 1996

abstract

In this paper we describe a new fiber confocal optical microscopy with miniature scanner and imaging optics that is being developed for in situ imaging applications. The microscope uses torsional mirrors to accomplish the scanning. The mirrors, which are 300 X 360 micrometers and 500 X 600 micrometers , respectively, are fabricated with silicon micromachining techniques and produce a raster scan at video rates suitable for real time imaging. The objective is an off-axis grating lens and has numerical aperture of 0.25. Imaging is monochromatic at (lambda) equals 0.6328 micrometers , and the system is capable of approximately 1.0 micrometers resolution over a 100 micrometers field of view. The cross sectional dimensions of the imaging head that contains the mirrors and the lens is 1.2 X 2.5 mm. We present the microscope architecture and discuss the design parameters, the limitations, and the performance tradeoffs that were faced in developing this microscope.

© (1996) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

David L. Dickensheets and Gordon S. Kino
"Micromachined confocal optical microscope", Proc. SPIE 2655, Three-Dimensional Microscopy: Image Acquisition and Processing III, 79 (April 10, 1996); doi:10.1117/12.237462; http://dx.doi.org/10.1117/12.237462


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