Preshaping photoresist for refractive microlens array fabrication

Theresa Rubico Jay; Margaret B. Stern

doi:10.1117/12.165698

15 December 1993 Preshaping photoresist for refractive microlens array fabrication

Theresa Rubico Jay, Margaret B. Stern

Proceedings Volume 1992, Miniature and Micro-Optics and Micromechanics; (1993) https://doi.org/10.1117/12.165698
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Refractive microlenses are fabricated by the P²ROM (Preshaped Photoresist Refractive Optics by Melting) process. A polar coordinate HeCd laser beam lithography system (laser writer) is used to directly expose a continuous spheroidal profile into photoresist to fabricate 200 micrometers diameter microlenses with speeds between F/1.5 and F/5. Interferometric surface measurements, used to determine optical quality of the preshaped microlenses, indicate reduced spherical aberration in slow lenses fabricated by this method.

Citation Download Citation

Theresa Rubico Jay and Margaret B. Stern "Preshaping photoresist for refractive microlens array fabrication", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165698

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