Laser processing of ceramics and metals by high-intensity picosecond and nanosecond laser pulses in UV, visible, and IR range of spectrum

Serge V. Garnov; Sergei M. Klimentov; Taras V. Kononenko; Vitali I. Konov; E. N. Lubnin; Friedrich Dausinger; Armin Raiber

doi:10.1117/12.237755

8 April 1996 Laser processing of ceramics and metals by high-intensity picosecond and nanosecond laser pulses in UV, visible, and IR range of spectrum

Serge V. Garnov, Sergei M. Klimentov, Taras V. Kononenko, Vitali I. Konov, E. N. Lubnin, Friedrich Dausinger, Armin Raiber

Author Affiliations +

Proceedings Volume 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics; (1996) https://doi.org/10.1117/12.237755
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

Experimental investigations of ablation processes of AlN, Si₃N₄(MgO), Si₃N₄(YAI) ceramics, steels and aluminum have been conducted using first, second and fourth harmonics of picosecond and nanosecond Nd:YAP laser (1078 nm basic wavelength). The measurements have been carried out in a wide range of incident power density values: 10¹⁰ - 10¹⁴ W/cm². The passive-active mode-locked/Q-switched laser with a high quality spatial and temporal distribution of output radiation operated at repetition rates of 1 - 10 Hz was used. The ablation rate dependencies obtained for multipulse irradiation regimes are presented and analyzed. The physical mechanisms responsible for ablation processes in pico- and nanosecond range of laser pulse duration are discussed. Special attention is paid to the role of plasma formation and modification of chemical composition of ceramic surface layers during the laser-matter interaction process. The scanning electron microscope pictures of ablated holes and cuts produced at different irradiation conditions are demonstrated. It is shown that at the relevant irradiation conditions the high quality regular microstructures consisted of holes, cuts, etc., with a typical size varied from tens to several microns could be produced using high peak power ultra short laser pulses.

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Serge V. Garnov, Sergei M. Klimentov, Taras V. Kononenko, Vitali I. Konov, E. N. Lubnin, Friedrich Dausinger, and Armin Raiber "Laser processing of ceramics and metals by high-intensity picosecond and nanosecond laser pulses in UV, visible, and IR range of spectrum", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); https://doi.org/10.1117/12.237755

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