Study of thin film inhomogeneity with a fast-scanning acousto-optic spectrophotometer

Alexander V. Tikhonravov; Michael K. Trubetskov; Andrew N. Tikhonov; Oleg B. Tcherednichenko; Boris G. Lysoi; Ksenia V. Mikhailova; Brian Thomas Sullivan; Jerzy A. Dobrowolski

doi:10.1117/12.246817

19 August 1996 Study of thin film inhomogeneity with a fast-scanning acousto-optic spectrophotometer

Alexander V. Tikhonravov, Michael K. Trubetskov, Andrew N. Tikhonov, Oleg B. Tcherednichenko, Boris G. Lysoi, Ksenia V. Mikhailova, Brian Thomas Sullivan, Jerzy A. Dobrowolski

Author Affiliations +

Proceedings Volume 2776, Developments in Optical Component Coatings; (1996) https://doi.org/10.1117/12.246817
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

A novel device, the fast-scanning acousto-optic spectrophotometer, was used to measure the in situ reflectance of a thin film during deposition. The reflectance data, which was measured at different film thicknesses and over a wavelength region from 400 to 1100 nm, was used to study the refractive index profile of inhomogeneous ZrO₂ films. This data was subsequently analyzed using a homogeneous thin film model to derive an 'effective' refractive index profile.

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Alexander V. Tikhonravov, Michael K. Trubetskov, Andrew N. Tikhonov, Oleg B. Tcherednichenko, Boris G. Lysoi, Ksenia V. Mikhailova, Brian Thomas Sullivan, and Jerzy A. Dobrowolski "Study of thin film inhomogeneity with a fast-scanning acousto-optic spectrophotometer", Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); https://doi.org/10.1117/12.246817

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