Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Optical coatings for UV photolithography systems

[+] Author Affiliations
Harry H. Bauer

Carl Zeiss (Germany)

Matthias Heller

M. Hensoldt AG (Germany)

Norbert Kaiser

Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)

Proc. SPIE 2776, Developments in Optical Component Coatings, 353 (August 19, 1996); doi:10.1117/12.246823
Text Size: A A A
From Conference Volume 2776

  • Developments in Optical Component Coatings
  • Ian Reid
  • Glasgow, United Kingdom | May 12, 1996

abstract

The performance of UV photolithography lens-systems with usually several ten optical components is limited by both the quality of the substrates and by the quality of the optical coatings. The key problems are the quality of the reflectance over large and strongly curved surfaces, the absorption and scatter losses and the behavior during heavy UV irradiation in production lines.

© (1996) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Harry H. Bauer ; Matthias Heller and Norbert Kaiser
"Optical coatings for UV photolithography systems", Proc. SPIE 2776, Developments in Optical Component Coatings, 353 (August 19, 1996); doi:10.1117/12.246823; http://dx.doi.org/10.1117/12.246823


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.