IR detection at room temperature using semiconducting YBaCuO

Donald P. Butler; Agha Jahanzeb; Pao C. Shan; Christine Mollenkopf Travers; Zeynep Celik-Butler

doi:10.1117/12.255167

22 October 1996 IR detection at room temperature using semiconducting YBaCuO

Donald P. Butler, Agha Jahanzeb, Pao C. Shan, Christine Mollenkopf Travers, Zeynep Celik-Butler

Proceedings Volume 2816, Infrared Detectors for Remote Sensing: Physics, Materials, and Devices; (1996) https://doi.org/10.1117/12.255167
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

Semiconducting YBaCuO thin films are a candidate for infrared bolometers operating at room temperature without the need for temperature control. Semiconducting YBaCuO thin films were fabricated by rf magnetron sputtering onto silicon substrates at room temperature. Room temperature deposition provides compatibility with CMOS technology to allow for the fabrication of low cost infrared imaging arrays with focal plane signal processing. The temperature coefficient of resistance (TCR) of the thin films was measured to be as high as 4% K^-1 over a wide temperature range near 300 K. In this respect, amorphous YBaCuO thin films provided a higher TCR than epitaxial, tetragonal YBa₂Cu₃O_6+x films. The noise voltage at 30 Hz was measured to be typically less than 1 (mu) V/Hz^1/2. If the thin films are integrated into a typical air-gap thermal isolation structure, the projected responsivity R_v would be as high as 3.8 multiplied by 10⁵ V/W with 1 (mu) A of current bias providing an estimated detectivity D^* of 1.6 multiplied by 10⁹ cm Hz^1/2/W at a frame frequency of 30 Hz.

Citation Download Citation

Donald P. Butler, Agha Jahanzeb, Pao C. Shan, Christine Mollenkopf Travers, and Zeynep Celik-Butler "IR detection at room temperature using semiconducting YBaCuO", Proc. SPIE 2816, Infrared Detectors for Remote Sensing: Physics, Materials, and Devices, (22 October 1996); https://doi.org/10.1117/12.255167

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