Statistical performance evaluation of electrostatic micro actuators for a deformable mirror

Raji Krishnamoorthy; Thomas G. Bifano; Guido V.H. Sandri

doi:10.1117/12.251251

23 September 1996 Statistical performance evaluation of electrostatic microactuators for a deformable mirror

Raji Krishnamoorthy, Thomas G. Bifano, Guido V.H. Sandri

Proceedings Volume 2881, Microelectronic Structures and MEMS for Optical Processing II; (1996) https://doi.org/10.1117/12.251251
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

This paper describes a study to characterize the performance of surface micromachined electrostatic actuators, with a brief introduction to some MEMS (microelectromechanical systems) mirrors developed at BU incorporating these actuators. Fixed-fixed actuators were extensively tested to determine suitability for optical applications, and specifically for an adaptive optics imagining system. The critical issues relating to device performance, namely yield (indicating robustness and process reliability), position repeatability, precision and frequency response, were quantified in the research effort described here. The study demonstrated 95% device yield, 10 nm position repeatability (99% confidence levels), and greater than 66 kHz frequency bandwidth.

Citation Download Citation

Raji Krishnamoorthy, Thomas G. Bifano, and Guido V.H. Sandri "Statistical performance evaluation of electrostatic microactuators for a deformable mirror", Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); https://doi.org/10.1117/12.251251

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