Metal insulator semiconductor structure single crystal silicon liquid crystal light valve

JiaoBo Gao; Ke-fei Ye; Yue-you Feng

doi:10.1117/12.253341

30 September 1996 Metal insulator semiconductor structure single crystal silicon liquid crystal light valve

JiaoBo Gao, Ke-fei Ye, Yue-you Feng

Proceedings Volume 2892, Display Devices and Systems; (1996) https://doi.org/10.1117/12.253341
Event: Photonics China '96, 1996, Beijing, China

Abstract

Detailed description of the structure, operation, fabrication, and performance of a fast-response metal- insulator-semiconductor structure single crystal silicon liquid crystal light valve (MIS-Si-LCLV) is given. A 45 degree(s) twisted nematic liquid crystal configuration has been utilized. A MIS-Si-LCLV is demonstrated with a limiting resolution of 40 lp/mm over a 45 mm aperture and contrast ratios of > 50:1, input light sensitivities at (lambda) equals 930 nm ((Delta) (lambda) equals 40 nm) of better than 30 (mu) W/cm² and response times as fast as 20 ms have been measured.

Citation Download Citation

JiaoBo Gao, Ke-fei Ye, and Yue-you Feng "Metal insulator semiconductor structure single crystal silicon liquid crystal light valve", Proc. SPIE 2892, Display Devices and Systems, (30 September 1996); https://doi.org/10.1117/12.253341

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