Internet remote microscope

James Kao; Donald E. Troxel; Somsak Kittipiyakul

doi:10.1117/12.262999

17 December 1996 Internet remote microscope

James Kao, Donald E. Troxel, Somsak Kittipiyakul

Proceedings Volume 2901, Telemanipulator and Telepresence Technologies III; (1996) https://doi.org/10.1117/12.262999
Event: Photonics East '96, 1996, Boston, MA, United States

Abstract

The MIT remote microscope is a telemicroscopy system that allows users to remotely control and view a microscope over the internet with a graphical interface that runs on an ordinary workstation computer. The microscope server consists of an automated Zeiss microscope that is controlled by a personal computer, while the client interface is implemented with custom software developed at MIT. The system was designed primarily to provide remote inspection capabilities for semiconductor researchers during the remote fabrication of integrated circuits, but can also be used as a general purpose instrument for remote inspections. The remote microscope also allows any number of clients to simultaneously view the microscope in a conference inspection mode, enabling collaboration opportunities among distant viewers. Because clients require no special hardware, the internet remote microscope is extremely accessible and easy to use, yet provides powerful remote inspection capabilities, collaboration opportunities, and easy access to hard to reach locations such as clean room environments for semiconductor processing.

Citation Download Citation

James Kao, Donald E. Troxel, and Somsak Kittipiyakul "Internet remote microscope", Proc. SPIE 2901, Telemanipulator and Telepresence Technologies III, (17 December 1996); https://doi.org/10.1117/12.262999

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