Tabletop factory to fabricate 3D microstructures: nano manufacturing world

Masayuki Nakao; Yotaro Hatamura; Tomomasa Sato

doi:10.1117/12.260629

11 December 1996 Tabletop factory to fabricate 3D microstructures: nano manufacturing world

Masayuki Nakao, Yotaro Hatamura, Tomomasa Sato

Proceedings Volume 2906, Microrobotics: Components and Applications; (1996) https://doi.org/10.1117/12.260629
Event: Photonics East '96, 1996, Boston, MA, United States

Abstract

To fabricate 3D microstructures, the authors designed, constructed and evaluated a tabletop factory called 'nano manufacturing world (NMW).' We designed a compact, concentrated layout of fabricating/handling machines around a workpiece for an integrated production, and an image- assisted tele-operation system between the processing site and the operating site. Using various working processes developed in NMW, e.g. dry-etching with a fast atom beam or assembling with a concentrated motion manipulator under a scanning electron microscope, we demonstrated fabricating some 3D microstructures such as a micro-tower or a micro- airplane. In addition to fabricate functional film features on the 3D microstructures, we are producing a micro magnetic head or a micro optical circuit in NMW. Through the demonstration, we evaluate that NMW functions effectively as designed and will become a solution for micro manufacturing systems.

Citation Download Citation

Masayuki Nakao, Yotaro Hatamura, and Tomomasa Sato "Tabletop factory to fabricate 3D microstructures: nano manufacturing world", Proc. SPIE 2906, Microrobotics: Components and Applications, (11 December 1996); https://doi.org/10.1117/12.260629

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