Paper
21 January 1997 Architecture for distributed design and fabrication
Michael B. McIlrath, Duane S. Boning, Donald E. Troxel
Author Affiliations +
Abstract
We describe a flexible, distributed system architecture capable of supporting collaborative design and fabrication of semi-conductor devices and integrated circuits. Such capabilities are of particular importance in the development of new technologies, where both equipment and expertise are limited. Distributed fabrication enables direct, remote, physical experimentation in the development of leading edge technology, where the necessary manufacturing resources are new, expensive, and scarce. Computational resources, software, processing equipment, and people may all be widely distributed; their effective integration is essential in order to achieve the realization of new technologies for specific product requirements. Our architecture leverages is essential in order to achieve the realization of new technologies for specific product requirements. Our architecture leverages current vendor and consortia developments to define software interfaces and infrastructure based on existing and merging networking, CIM, and CAD standards. Process engineers and product designers access processing and simulation results through a common interface and collaborate across the distributed manufacturing environment.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael B. McIlrath, Duane S. Boning, and Donald E. Troxel "Architecture for distributed design and fabrication", Proc. SPIE 2913, Plug and Play Software for Agile Manufacturing, (21 January 1997); https://doi.org/10.1117/12.263462
Lens.org Logo
CITATIONS
Cited by 3 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Computer aided design

Human-machine interfaces

Control systems

Internet

Plasma etching

Computer architecture

Interfaces

Back to Top