Confocal interference microscopy

Colin J. R. Sheppard; Hao Zhou

doi:10.1117/12.271254

10 April 1997 Confocal interference microscopy

Colin J. R. Sheppard, Hao Zhou

Proceedings Volume 2984, Three-Dimensional Microscopy: Image Acquisition and Processing IV; (1997) https://doi.org/10.1117/12.271254
Event: BiOS '97, Part of Photonics West, 1997, San Jose, CA, United States

Abstract

Confocal interference microscopy can be used to obtain phase information in a confocal microscope. Different methods of recovering phase are discussed. A fiber optic confocal interference microscope has been developed. Confocal interference can be used to investigate aberrations in a confocal microscope. Methods of profiling surfaces are reviewed. Depth profiling of stratified media is considered.

Citation Download Citation

Colin J. R. Sheppard and Hao Zhou "Confocal interference microscopy", Proc. SPIE 2984, Three-Dimensional Microscopy: Image Acquisition and Processing IV, (10 April 1997); https://doi.org/10.1117/12.271254

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