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Proceedings Article

Confocal interference microscopy

[+] Author Affiliations
Colin J. R. Sheppard, Hao Zhou

Univ. of Sydney (Australia)

Proc. SPIE 2984, Three-Dimensional Microscopy: Image Acquisition and Processing IV, 85 (April 10, 1997); doi:10.1117/12.271254
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From Conference Volume 2984

  • Three-Dimensional Microscopy: Image Acquisition and Processing IV
  • Carol J. Cogswell; Jose-Angel Conchello; Tony Wilson
  • San Jose, CA, USA | February 08, 1997

abstract

Confocal interference microscopy can be used to obtain phase information in a confocal microscope. Different methods of recovering phase are discussed. A fiber optic confocal interference microscope has been developed. Confocal interference can be used to investigate aberrations in a confocal microscope. Methods of profiling surfaces are reviewed. Depth profiling of stratified media is considered.

© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Colin J. R. Sheppard and Hao Zhou
"Confocal interference microscopy", Proc. SPIE 2984, Three-Dimensional Microscopy: Image Acquisition and Processing IV, 85 (April 10, 1997); doi:10.1117/12.271254; http://dx.doi.org/10.1117/12.271254


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