Direct-write UV-laser microfabrication of 3D structures in lithium-aluminosilicate glass

William W. Hansen; Siegfried W. Janson; Henry Helvajian

doi:10.1117/12.273716

9 May 1997 Direct-write UV-laser microfabrication of 3D structures in lithium-aluminosilicate glass

William W. Hansen, Siegfried W. Janson, Henry Helvajian

Proceedings Volume 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II; (1997) https://doi.org/10.1117/12.273716
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

The direct-write laser machining technique has been used to process a lithium-alumosilicate glass (Foturan^TM) for an application which requires 3D patterned microstructures. Using two UV laser wavelengths (248 nm and 355 nm), microcavities and microstructures have been fabricated for the development of microthrusters for attitude and orbit control of a 1 kg class (10 cm diameter) nanosatellite. In addition, experiments have been conducted to define the processing window for the laser patterning technique. The results include a measure of the change in Foturan strength after a required program bake cycle plus HF etching rates as a function of the laser repetition rate for the two UV wavelengths.

Citation Download Citation

William W. Hansen, Siegfried W. Janson, and Henry Helvajian "Direct-write UV-laser microfabrication of 3D structures in lithium-aluminosilicate glass", Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); https://doi.org/10.1117/12.273716

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