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Proceedings Article

Design of modern nanofabrication facilities

[+] Author Affiliations
Sarah Beswick, Andrew Smith, Dru Morrish, Daniel J. Day, Saulius Juodkazis, Min Gu

Swinburne Univ. of Technology (Australia)

Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82043K (December 23, 2011); doi:10.1117/12.904711
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From Conference Volume 8204

  • Smart Nano-Micro Materials and Devices
  • Saulius Juodkazis; Min Gu
  • Melbourne, Australia | December 04, 2011

abstract

We present a set of practical rules critical for designing and building a modern nanotechnology laboratory, focused on photonic applications in a cleanroom environment. We show the impacts on time, cost and quality of early design decisions and its importance on achieving the final fully functional laboratory. Best practice examples are presented for setting up a modern laboratory/facility, following analysis of the time, cost and quality constraints. The case study presented is the engineering and architectural solution of the nanofabrication cleanroom facility in the Advanced Technology Centre at Swinburne University of Technology, Australia. Set of practical rules is established for the cost and time efficient set up of the nanotechnology facilities for the research and development.

© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Sarah Beswick ; Andrew Smith ; Dru Morrish ; Daniel J. Day ; Saulius Juodkazis, et al.
"Design of modern nanofabrication facilities", Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82043K (December 23, 2011); doi:10.1117/12.904711; http://dx.doi.org/10.1117/12.904711


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