Optical properties of TiO2 thin film grown on quartz substrate by sol-gel method

Jianjun Tian; Hongmei Deng; Lin Sun; Hui Kong; Pingxiong Yang; Junhao Chu

doi:10.1117/12.916849

22 February 2012 Optical properties of TiO₂ thin film grown on quartz substrate by sol-gel method

Jianjun Tian, Hongmei Deng, Lin Sun, Hui Kong, Pingxiong Yang, Junhao Chu

Proceedings Volume 8333, Photonics and Optoelectronics Meetings (POEM) 2011: Optoelectronic Devices and Integration; 83331D (2012) https://doi.org/10.1117/12.916849
Event: Photonics and Optoelectronics Meetings 2011, 2011, Wuhan, China

Abstract

TiO₂ film was deposited on quartz substrate by sol-gel method. X-ray diffraction analysis and Raman scattering measurement indicate that the TiO₂ film is the pure rutile phase structure. From photoluminescence spectra, it is found that the TiO₂ film shows a near-infrared luminescence band centered at about 832 nm, and two visible luminescence bands centered at about 426 nm and 524 nm, respectively. The refractive index n, extinct coefficient k, optical band gap EOBG and thickness d of TiO₂ film were extracted by fitting transmission spectra with the Adachi's dielectric function model and a three-phase layered model. It is found that n value increases and then decreases with increasing wavelength, while k decreases continuously. The thickness of TiO₂ film is about 297 nm. EOBG value is about 3.72eV and larger than that attained by Tauc's law, which is about 3.28eV.

Citation Download Citation

Jianjun Tian, Hongmei Deng, Lin Sun, Hui Kong, Pingxiong Yang, and Junhao Chu "Optical properties of TiO₂ thin film grown on quartz substrate by sol-gel method", Proc. SPIE 8333, Photonics and Optoelectronics Meetings (POEM) 2011: Optoelectronic Devices and Integration, 83331D (22 February 2012); https://doi.org/10.1117/12.916849

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available