CMOS compatible silicon-based Mach-Zehnder optical modulators with improved extinction ratio

Zhiyong Li; Liang Zhou; Yingtao Hu; Xi Xiao; Yude Yu; Jinzhong Yu

doi:10.1117/12.918869

22 February 2012 CMOS compatible silicon-based Mach-Zehnder optical modulators with improved extinction ratio

Zhiyong Li, Liang Zhou, Yingtao Hu, Xi Xiao, Yude Yu, Jinzhong Yu

Proceedings Volume 8333, Photonics and Optoelectronics Meetings (POEM) 2011: Optoelectronic Devices and Integration; 833305 (2012) https://doi.org/10.1117/12.918869
Event: Photonics and Optoelectronics Meetings 2011, 2011, Wuhan, China

Abstract

Improved Extinction Ratio of 25 dB was demonstrated in silicon based optical modulators on CMOS platform in China. The measurement results agree with the simulation, followed by a discussion about the effects of both propagation loss in Mach-Zehnder arms and power ratio at beam splitters and combiners. The analyses indicate that many considerations have to be taken into design and development of the compatible fabrication of these integrated silicon photonics, especially for the improved extinction ratio of optical modulators. In this summary, we propose the integrated optical modulators in SOI by use of the compatible CMOS processes under the modern CMOS foundry in Chinese homeland. And the measured results were shown, the fast response modulator with the data transmission rate of 10 Gbps.

Citation Download Citation

Zhiyong Li, Liang Zhou, Yingtao Hu, Xi Xiao, Yude Yu, and Jinzhong Yu "CMOS compatible silicon-based Mach-Zehnder optical modulators with improved extinction ratio", Proc. SPIE 8333, Photonics and Optoelectronics Meetings (POEM) 2011: Optoelectronic Devices and Integration, 833305 (22 February 2012); https://doi.org/10.1117/12.918869

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