Fully integrated litho aware PnR design solution

Charlotte Beylier; Clement Moyroud; Fabrice Bernard Granger; Frederic Robert; Emek Yesilada; Yorick Trouiller; Jean-Claude Marin

doi:10.1117/12.916138

14 March 2012 Fully integrated litho aware PnR design solution

Charlotte Beylier, Clement Moyroud, Fabrice Bernard Granger, Frederic Robert, Emek Yesilada, Yorick Trouiller, Jean-Claude Marin

Author Affiliations +

Proceedings Volume 8327, Design for Manufacturability through Design-Process Integration VI; 83270A (2012) https://doi.org/10.1117/12.916138
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

Design For Manufacturing (DFM) is becoming essential to ensure good yield for deep sub micron technologies. As design rules cannot anticipate all manufacturing marginalities resulting from problematic 2D patterns, the latter has to be addressed at design level through DFM tools. To deploy DFM strategy on back end levels, STMicroelectronics has implemented a CAD solution for lithographic hotspots search and repair. This allows the detection and the correction, at the routing step, of hotspots derived from lithographic simulation after OPC treatment. The detection of hotspots is based on pattern matching and the repair uses local reroute ability already implemented in Place and Route (PnR) tools. This solution is packaged in a Fast LFD Kit for 28 nm technology and fully integrated in PnR platforms. It offers a solution for multi suppliers CAD vendors routed designs. To ensure a litho friendly repair, the flow integrates a step of local simulation of the rerouted zones. This paper explains the hotspots identification, their detection through pattern matching and repair in the PnR platform. Run time, efficiency rate, timing and RC parasitic impacts are also analyzed.

Citation Download Citation

Charlotte Beylier, Clement Moyroud, Fabrice Bernard Granger, Frederic Robert, Emek Yesilada, Yorick Trouiller, and Jean-Claude Marin "Fully integrated litho aware PnR design solution", Proc. SPIE 8327, Design for Manufacturability through Design-Process Integration VI, 83270A (14 March 2012); https://doi.org/10.1117/12.916138

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available