Conference Summary High Resolution Soft X-Ray Optics

A. Franks

doi:10.1117/12.933156

24 March 1982 Conference Summary High Resolution Soft X-Ray Optics

A. Franks

Proceedings Volume 0316, High Resolution Soft X-Ray Optics; (1982) https://doi.org/10.1117/12.933156
Event: 1981 Brookhaven Conferences, 1981, Upton, United States

Abstract

The main topics discussed at the Conference were multilayer mirror optics and their applications, the manufacture and metrology of X-ray optical components, and microfabrication, particularly of zone plates for X-ray microscopy. The attainment of high resolution and the full potential of multilayer mirrors will require advances to be made in manufacturing technology, metrology and in the selection of suitable substrate materials.

Citation Download Citation

A. Franks "Conference Summary High Resolution Soft X-Ray Optics", Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); https://doi.org/10.1117/12.933156

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