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Proceedings Article

Instrumentation Of A Variable Angle Scatterometer (VAS)

[+] Author Affiliations
Fred D. Orazio, Jr., Robert M. Silva

VTI, Inc. (United States)

W. K. Stowell

AFWAL/AADO-2 (United States)

Proc. SPIE 0362, Scattering in Optical Materials II, 165 (April 5, 1983); doi:10.1117/12.934147
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From Conference Volume 0362

  • Scattering in Optical Materials II
  • Solomon Musikant
  • San Diego | August 24, 1982

abstract

The problem of light scatter from optical surfaces is amplified to a critical level for the optics used in the Ring Laser Gyro (RLG). This has led to the development of a scatterometer at the RLG Lab, Wright-Patterson AFB, which can detect low level light scatter from the high quality optics used in RLG's, without first overcoating with metals. A helium-neon laser is used to illuminate a 0.5 mm diameter spot on the surface of the test part. The incident angle can be varied from 0 to 90 degrees, and the test piece can be maneuvered with five degrees of freedom, four of which are computer controlled. Scatter measurements are made with a photomultiplier detection system which can easily measure down to 10 parts per billion per steradian. The computer can analyze and plot the results very quickly and accurately for further interpretation.

© (1983) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Fred D. Orazio, Jr. ; W. K. Stowell and Robert M. Silva
"Instrumentation Of A Variable Angle Scatterometer (VAS)", Proc. SPIE 0362, Scattering in Optical Materials II, 165 (April 5, 1983); doi:10.1117/12.934147; http://dx.doi.org/10.1117/12.934147


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