Design Review Of Three Reflectance Scatterometers

John C. Stover; Calvin H. Gillespie

doi:10.1117/12.934148

5 April 1983 Design Review Of Three Reflectance Scatterometers

John C. Stover, Calvin H. Gillespie

Proceedings Volume 0362, Scattering in Optical Materials II; (1983) https://doi.org/10.1117/12.934148
Event: 26th Annual Technical Symposium, 1982, San Diego, United States

Abstract

Design considerations for three scatterometers are presented. The first instrument, a total integrated scatter device, is currently used to make scatter measurements on flat reflectors in an optical finishing lab. The second scatterometer is a small research oriented system, nearly complete, which measures scattering intensity from relatively small diameter reflectors (a few inches) as a function of angle in the incident plane. The third system, which is still undergoing final design, also measures scattering intensity as a function of angle but will be able to do so in a nearly complete hemisphere in front of the sample. In addition, this third system will have variable angle of incidence capability and be able to measure scatter from any spot on flat reflectors up to 14 inches in diameter. Each of these systems is controlled by a small digital computer which, after initial system alignment, directs the measurement procedure, records data and analyzes results. This paper examines the problems associated with the mechanical motions of the systems, sample holding and orientation, system alignment, data compression and measurement of optical intensities that vary by as much as eight orders of magnitude. A short review of some applications for the data generated by these types of scatterometers is also given.

Citation Download Citation

John C. Stover and Calvin H. Gillespie "Design Review Of Three Reflectance Scatterometers", Proc. SPIE 0362, Scattering in Optical Materials II, (5 April 1983); https://doi.org/10.1117/12.934148

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