Uv-Induced Photodeposition Of Fe Films From Iron Carbonyl

P J Love; R T Loda; R A Rosenberg; A K Green; Victor Rehn

doi:10.1117/12.939431

14 June 1984 Uv-Induced Photodeposition Of Fe Films From Iron Carbonyl

P J Love, R T Loda, R A Rosenberg, A K Green, Victor Rehn

Proceedings Volume 0459, Laser-Assisted Deposition, Etching, and Doping; (1984) https://doi.org/10.1117/12.939431
Event: 1984 Los Angeles Technical Symposium, 1984, Los Angeles, United States

Abstract

We present results on the 77K photodecomposition of Fe(C0)5 to produce Fe films using synchrotron and excimer laser radiation. Analysis of these films included in situ photon-stimulated ion desorption (PSID) and total electron yield (TEY) spectroscopies, and ex situ Auger electron spectroscopy (AES), scanning electron microscopy (SEM), X-ray fluorescence, and resistivity measurements. For the films grown using synchrotron radiation, the various ion products were identified and their intensities monitored during photolysis. For the films grown using excimer laser radiation, appropriate laser power densities and Fe(C0)₅ pressures produced adherent metallic films which contained less than 13 atomic % oxygen and carbon contamination.

Citation Download Citation

P J Love, R T Loda, R A Rosenberg, A K Green, and Victor Rehn "Uv-Induced Photodeposition Of Fe Films From Iron Carbonyl", Proc. SPIE 0459, Laser-Assisted Deposition, Etching, and Doping, (14 June 1984); https://doi.org/10.1117/12.939431

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