Increasing The Registration Accuracy Of Step And Repeat Systems Through Software Improvement

M. Yeung; J. Langston; C. Sparkes

doi:10.1117/12.949729

2 January 1986 Increasing The Registration Accuracy Of Step And Repeat Systems Through Software Improvement

M. Yeung, J. Langston, C. Sparkes

Proceedings Volume 0565, Micron and Submicron Integrated Circuit Metrology; (1986) https://doi.org/10.1117/12.949729
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

A new software option was developed for GCA wafer steppers which enables the site-by-site alignment system to be used as an automatic tool for stepper self-calibration and grid-matching. This software, called grid standardization, permits the use of ideal wafers to self-tune the stepper grid to a standard via site-by-site alignment prior to stepping product wafers. In this paper, the potential of this improved method of global alignment for use in VLSI circuit production is assessed by analyzing its various sources of misregistration. A mathematical model is developed which allows registration accuracy to be predicted for a given set of processing conditions.

Citation Download Citation

M. Yeung, J. Langston, and C. Sparkes "Increasing The Registration Accuracy Of Step And Repeat Systems Through Software Improvement", Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); https://doi.org/10.1117/12.949729

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