Industrial Applications Of Excimer Lasers

Thomas Znotins

doi:10.1117/12.938924

12 November 1986 Industrial Applications Of Excimer Lasers

Thomas Znotins

Proceedings Volume 0668, Laser Processing: Fundamentals, Applications, and Systems Engineering; (1986) https://doi.org/10.1117/12.938924
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

Excimer lasers are finding increasing use in both semiconductor and materials processing. In the semiconductor area, this has led to the development of excimer based processes for lithography, film deposition, etching, doping and annealing. In materials processing, the unique capabilities of the excimer laser offers the potential for greatly extending the range of laser based cutting, drilling and marking techniques. This paper is intended to provide an overview of these areas. Attention is given to the means by which the excimer laser addresses the critical needs in each particular case.

Citation Download Citation

Thomas Znotins "Industrial Applications Of Excimer Lasers", Proc. SPIE 0668, Laser Processing: Fundamentals, Applications, and Systems Engineering, (12 November 1986); https://doi.org/10.1117/12.938924

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available