Automatic Measurements Of The Small Angle Variation Using A Holographic Moire Interferometry And A Computer Processing

Yoshiaki Nakano

doi:10.1117/12.939058

15 January 1988 Automatic Measurements Of The Small Angle Variation Using A Holographic Moire Interferometry And A Computer Processing

Yoshiaki Nakano

Author Affiliations +

Proceedings Volume 0673, Holography Applications; (1988) https://doi.org/10.1117/12.939058
Event: Holography Applications, 1986, Beijing, China

Abstract

A method for automatic measurement of the small tilt angle variation of an object surface by using a digital holographic moire interferometryI based on computer processing is described. The test surface is placed in the middle of a set of two gratings. A monochromatic plane wave illuminates the first grating and undergoes diffraction. After being reflected by the test surface, the first grating produces the magnified Talbot image. The moire fringe is generated by superimposing this Talbot image on the second grating. The inclination angle of the moire fringe is a measure of the tilt angle of the test surface. Fast and automatic measurement has been achieved with improved accuracy and sensitivity. In the experiment, the small tilt angle variation of the plane mirror is measured.

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Yoshiaki Nakano "Automatic Measurements Of The Small Angle Variation Using A Holographic Moire Interferometry And A Computer Processing", Proc. SPIE 0673, Holography Applications, (15 January 1988); https://doi.org/10.1117/12.939058

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