Industrial Applications Of Excimer Lasers

Thomas Znotins

doi:10.1117/12.937297

11 March 1987 Industrial Applications Of Excimer Lasers

Thomas Znotins

Proceedings Volume 0710, Excimer Lasers and Optics; (1987) https://doi.org/10.1117/12.937297
Event: Cambridge Symposium-Fiber/LASE '86, 1986, Cambridge, MA, United States

Abstract

Excimer lasers are finding increasing use in both semiconductor and materials processing. In the semiconductor area, this has led to the development of excimer based processes for lithography, film deposition, etching, doping and annealing. In materials processing, the unique capabilities of the excimer laser offers the potential for greatly extending the range of laser based cutting, drilling and marking techniques. This paper is intended to provide an overview of these areas. Attention is given to the means by which the excimer laser addresses the critical needs in each particular case.

Citation Download Citation

Thomas Znotins "Industrial Applications Of Excimer Lasers", Proc. SPIE 0710, Excimer Lasers and Optics, (11 March 1987); https://doi.org/10.1117/12.937297

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