Vibration Control in Sub-nanometre Metrology

D. G. Chetwynd

doi:10.1117/12.937906

26 August 1987 Vibration Control in Sub-nanometre Metrology

D. G. Chetwynd

Proceedings Volume 0732, 1st Intl Conf on Vibration Control in Optics and Metrology; (1987) https://doi.org/10.1117/12.937906
Event: 1st International Conference on Vibrational Control in Optics and Metrology, 1987, London, United Kingdom

Abstract

The use of X-ray interferometry makes possible the calibration of microdisplacement transducers to precisions of around 10 pm on a relatively routine basis. Naturally, this is not achieved without careful mechanical design, especially with regard to vibration isolation and thermal stability. A facility has been constructed, and is described here, for the evaluation of this method. Its performance when operating with a single-crystal silicon monolithic interferometer is examined. In many respects the system design follows conventional patterns, for example in using a high mass base supported on active air-springs. However, as the most sensitive parts are required to have controlled motion while in operation, particular attention is paid to the active force-loops. A solenoid-based force transducer is shown to have ideal characteristics for this application.

Citation Download Citation

D. G. Chetwynd "Vibration Control in Sub-nanometre Metrology", Proc. SPIE 0732, 1st Intl Conf on Vibration Control in Optics and Metrology, (26 August 1987); https://doi.org/10.1117/12.937906

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available