M400 - A Coordinate Measuring Machine With 10 nm Resolution

K. Becker; E. Heynacher

doi:10.1117/12.967123

1 January 1987 M400 - A Coordinate Measuring Machine With 10 nm Resolution

K. Becker, E. Heynacher

Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967123
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

In order to achieve a high reproducibility and high working velocity in the production of high quality optics, Zeiss concepted a numerically controlled polishing/testing system which consists of a CNC-controlled polishing machine and a computer controlled measuring machine. The data can be exchanged between the two machines and thus used for an in-cycle optimization procedure for the optical surface to be machined. The requirements for the resolution of the measurement were given by the precision of the optical components which have to be tested on the machine: These will be mainly mirrors for applications with synchrotron radiation. Surface slope errors are specified there to be as small as 0,1 arcsec in some cases. This required the construction of a coordinate measuring machine (CMM) with a positional resolution of 10 nm in all three coordinates. The concept of the CMM is based on the complete separation of machine controlling and measuring systems. Thus the results of the measurements are not related to the quality of machine axes but to the quality of reference mirrors which form normals for the three coordinate axes. Experiments performed until now show a reproducibility of better than 0,1 arcsec. Both linear as well as scanning areal measurements have been performed until now and used for the optimization of high quality mirrors for synchrotron radiation applications.

Citation Download Citation

K. Becker and E. Heynacher "M400 - A Coordinate Measuring Machine With 10 nm Resolution", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); https://doi.org/10.1117/12.967123

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