Precise Measurement Of Pzt Mirror Movement Using Fft Method

Toyohiko Yatagai; Masaya Kobayashi

doi:10.1117/12.967153

1 January 1987 Precise Measurement Of Pzt Mirror Movement Using Fft Method

Toyohiko Yatagai, Masaya Kobayashi

Proceedings Volume 0813, Optics and the Information Age; (1987) https://doi.org/10.1117/12.967153
Event: 14th Congress of the International Commission for Optics, 1987, Quebec, Canada

Abstract

Recently smart algorithms for interferometric fringe analysis have been developed, including the fringe scanning or the phase shifting method, the subfringe integration method, the FFT method and so on. Some of them cover the measurement ranges from 1/1000 wavelength to 10 wavelength with very high accuracy and repeatability.

Citation Download Citation

Toyohiko Yatagai and Masaya Kobayashi "Precise Measurement Of Pzt Mirror Movement Using Fft Method", Proc. SPIE 0813, Optics and the Information Age, (1 January 1987); https://doi.org/10.1117/12.967153

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