Application Of Non-Stereoscopic Secondary Electron Microscopy And Optical Spectroscopy For The Evaluation Of A Pronounced Microroughness

Michael Kohl; Thomas Walter; Karlhanns Gindele

doi:10.1117/12.949181

21 March 1989 Application Of Non-Stereoscopic Secondary Electron Microscopy And Optical Spectroscopy For The Evaluation Of A Pronounced Microroughness

Michael Kohl, Thomas Walter, Karlhanns Gindele

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Proceedings Volume 1009, Surface Measurement and Characterization; (1989) https://doi.org/10.1117/12.949181
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Absorber coatings for solar-thermal energy conversion must have a low reflectance in the wavelength range of the solar irradiation and a high reflectance in the range of thermal radiation. There are several physical principles providing such a spectral behaviour. One of them is a surface microroughness with an rms-roughness smaller than 0.5 µm and a correlation length of the same order of magnitude or smaller. Only few measurement techniques can be used for the characterization of such a microstructure. This paper will discuss the applicability of non-stereoscopic scanning electron microscopy (SEM) with digital image processing for the evaluation of the correlation length of the microstructure. Emphasis will lie on the investigation of pyramidal structures, for which angular dependent SEM can yield additional information about the mean slope of the structure. The results are compared with the outcome of the evaluation of spectrooptical measurements in the wavelength range from 0,36 - 15 µm by means of statistical scattering theories. These measurements are carried out with a Zeiss PMQ3-spectrophotometer-system with a BaSO4-coated integrated sphere (0.36-2.5 µm), and with a Bruker FTIR spectrometer equipped with a diffuse-gold coated integrating sphere (2,0 - 15 µm), respectively.

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Michael Kohl, Thomas Walter, and Karlhanns Gindele "Application Of Non-Stereoscopic Secondary Electron Microscopy And Optical Spectroscopy For The Evaluation Of A Pronounced Microroughness", Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); https://doi.org/10.1117/12.949181

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KEYWORDS

Scanning electron microscopy

Reflectivity

Chromium

Aluminum

Mirrors

Oxides

Silicon

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