Excimer Laser Stepper for Sub-half Micron Lithography

Akikazu Tanimoto; Akira Miyaji; Yutaka Ichihara; Tsunesaburoh Uemura; Issey Tanaka

doi:10.1117/12.953172

25 July 1989 Excimer Laser Stepper for Sub-half Micron Lithography

Akikazu Tanimoto, Akira Miyaji, Yutaka Ichihara, Tsunesaburoh Uemura, Issey Tanaka

Proceedings Volume 1088, Optical/Laser Microlithography II; (1989) https://doi.org/10.1117/12.953172
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

An excimer laser stepper having a flat image field was developed. Using a frequency stabilized, narrow band KrF 248nm laser (FWHM≈3μm), this stepper can print uniform patterns under 0.5 μm over a 15 mm square field. When the excimer laser output power is 2W, illumination intensity is more than 40 mW/cm2. Illumination uniformity is within ±2.5% over the field and exposure energy density is controlled within the precision of ±1.596, using an integrator sensor and a pulse number controller. A chromatic projection lens is adjusted so finely that aberrations are removed. In order to get imaging stability, a lens controller is used. An alignment system is off-axis, using He-Ne laser light spots and diffraction light detectors. By employing the EGA (Enhanced Global Alignment) method, overlay accuracy better than 0.18μm was obtained. Because the alignment detection light is insensitive to the resist, any types of resist may be used. The developed system has all the basic functions of a stepper. It can be used to improve DUV process and to fabricate sub-half micron devices in a laboratory.

Citation Download Citation

Akikazu Tanimoto, Akira Miyaji, Yutaka Ichihara, Tsunesaburoh Uemura, and Issey Tanaka "Excimer Laser Stepper for Sub-half Micron Lithography", Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); https://doi.org/10.1117/12.953172

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available