Paper
8 January 1990 High Reflectance Low Scatter Laser Mirrors
Dirk-Roger Schmitt
Author Affiliations +
Proceedings Volume 1125, Thin Films in Optics; (1990) https://doi.org/10.1117/12.961361
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France
Abstract
High reflectance low-scatter mirrors have been developed for laser-gyro applications. The mirrors were made of a multilayer system consisting of SiO2 and of a new unusual material for the high index layer. This material is a compound of titanium oxide and praseodymium oxide which is oxygen depleted (PrTiO3-x). To obtain best results superpolished substrates were fabricated. They were examined by high resolution Nomarski differential contrast microscopy and light scattering. The laser mirrors were produced in a Balzers BAK 600 plant. Both coating materials were electron-gun evaporated at different oxygen partial pressures. The fabricated mirrors were investigated in terms of reflectivity and scattering using an ultra-precise measurement equipment. Scattering was measured in an Ulbricht integrating sphere; resolution: 0.2.10-6. Reflectivity measurements were carried out in a special developed reflectometer with a resolution of 10.10-6.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dirk-Roger Schmitt "High Reflectance Low Scatter Laser Mirrors", Proc. SPIE 1125, Thin Films in Optics, (8 January 1990); https://doi.org/10.1117/12.961361
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KEYWORDS
Mirrors

Scattering

Surface finishing

Reflectivity

Polishing

Laser scattering

Oxygen

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