The Plasma Focus As Soft X-Ray Source For Microscopy And Lithography

W. Neff; J Eberle; R. Holz; R. Lebert; F. Richter

doi:10.1117/12.961796

27 November 1989 The Plasma Focus As Soft X-Ray Source For Microscopy And Lithography

W. Neff, J Eberle, R. Holz, R. Lebert, F. Richter

Proceedings Volume 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation; (1989) https://doi.org/10.1117/12.961796
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

Plaafocs devices producing small volume of plasma with electron density n_e ≈ 10²⁰ cm^-3 and mean particle energy of about 1 keV seem to meet the requirements for compact X-ray sources for industrial use. Their emission properties can be taylored for X-ray microscopy where narrowband emission with high spectral brilliance in the water window (2.4 nm to 4.3 nm) is required, as well as for X-ray lithography demanding for high mean power in the wavelength region from 0.7 nm to 1.0 nm. For X-ray microscopy the emission of Lyman-a lines is of advantage whereas for X-ray lithography the broadband continuum and line radiation can be used. For X-ray microscopy a single pulse source using the is - 2p line of nitrogen VII at 2.48 nm and for X-ray lithography a source running with several Hz repetition rate using the emission of hydrogen- and heliumlike neon ions around 1 nm are being developed.

Citation Download Citation

W. Neff, J Eberle, R. Holz, R. Lebert, and F. Richter "The Plasma Focus As Soft X-Ray Source For Microscopy And Lithography", Proc. SPIE 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation, (27 November 1989); https://doi.org/10.1117/12.961796

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available