Profile Measurement With A Phase-Shifting Common-Path Polarization Interferometer

Koichi Iwata; Takayuki Nishikawa

doi:10.1117/12.962765

25 April 1990 Profile Measurement With A Phase-Shifting Common-Path Polarization Interferometer

Koichi Iwata, Takayuki Nishikawa

Proceedings Volume 1162, Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series; (1990) https://doi.org/10.1117/12.962765
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

A common-path polarization interferometer is constructed for measuring microscopic surface profile. A double-focus lens made of birefringent material is used to divide the wave. To detect phase difference smaller than unit fringe, phase-shifting technique is adopted. This optical system is expected to be insensitive to vibration, temperature variation and air draft because of its common-path geometry. With this system microscopic surface profiles of some samples are measured. The measurements confirm its insensitiveness to vibration. On the basis of the results of the experiment, some problems for this type of an interferometer are discussed.

Citation Download Citation

Koichi Iwata and Takayuki Nishikawa "Profile Measurement With A Phase-Shifting Common-Path Polarization Interferometer", Proc. SPIE 1162, Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series, (25 April 1990); https://doi.org/10.1117/12.962765

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